EE5171
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EE 5171 - Microelectronic Fabrication (3 Cr.) Online may be available
Electrical and Computer Engineering (11122)
TIOT - College of Science and Engineering
Course description
Fabrication of microelectronic devices. Silicon integrated circuits, GaAs devices. Lithography, oxidation, diffusion. Process integration of various technologies, including CMOS, double poly bipolar, and GaAs MESFET.
prereq: CSE grad student or dept consent
prereq: CSE grad student or dept consent
Minimum credits
3
Maximum credits
3
Is this course repeatable?
No
Grading basis
OPT - Student Option
Lecture
Requirements
000356
Fulfills the writing intensive requirement?
No
Typically offered term(s)
Every Fall